Txoj Cai Ua Haujlwm thiab kev siv ntawm Atomic Force Microscopes
1, Cov ntsiab cai yooj yim
Atomic force microscopy siv qhov sib cuam tshuam quab yuam (atomic quab yuam) nruab nrab ntawm qhov chaw ntawm tus qauv thiab qhov kawg ntawm kev sojntsuam zoo los ntsuas qhov morphology saum npoo.
Qhov kev sojntsuam taub yog nyob rau ntawm lub me me hloov tau yooj yim cantilever, thiab kev sib cuam tshuam tsim tawm thaum qhov kev sojntsuam tiv tauj cov qauv saum npoo tau kuaj pom hauv daim ntawv ntawm cantilever deflection. Qhov kev ncua deb ntawm tus qauv saum npoo thiab qhov kev sojntsuam yog tsawg dua 3-4nm, thiab qhov quab yuam pom ntawm lawv tsawg dua 10-8N. Lub teeb los ntawm lub laser diode yog tsom rau sab nraum qab ntawm cantilever. Thaum lub cantilever khoov nyob rau hauv qhov kev txiav txim ntawm quab yuam, lub teeb pom kev yog deflected, thiab ib txoj hauj lwm rhiab photodetector yog siv los deflect lub kaum sab xis. Tom qab ntawd, cov ntaub ntawv khaws cia yog ua tiav los ntawm lub computer kom tau txais cov duab peb sab ntawm cov qauv saum npoo.
Kev sojntsuam cantilever tiav yog muab tso rau saum npoo ntawm cov qauv tswj los ntawm piezoelectric scanner thiab luam tawm hauv peb cov lus qhia nrog cov kauj ruam dav ntawm 0.1 nm lossis tsawg dua hauv kab rov tav raug. Feem ntau, thaum luam theej duab tus qauv saum npoo kom ntxaws (XY axis), Z-axis tswj los ntawm kev tawm tswv yim tawm ntawm lub cantilever tseem ruaj khov thiab tsis hloov pauv. Z-axis qhov tseem ceeb uas muab cov lus teb rau cov lus teb scanning yog nkag mus rau hauv lub computer rau kev ua, uas ua rau pom cov duab (3D duab) ntawm cov qauv saum npoo.
Cov yam ntxwv ntawm Atomic Force Microscopy
1. Lub siab - daws teeb meem muaj peev xwm deb tshaj qhov scanning electron microscopes (SEM) thiab optical roughness meters. Cov ntaub ntawv peb sab - cov ntaub ntawv nyob rau saum npoo ntawm cov qauv ua tau raws li qhov xav tau ntawm kev tshawb fawb, kev tsim khoom, thiab kev soj ntsuam zoo.
2. Tsis muaj kev puas tsuaj, kev sib cuam tshuam ntawm qhov kev sojntsuam thiab cov qauv saum npoo yog qis dua 10-8N, uas yog qis dua qhov siab ntawm cov khoom siv stylus roughness meters. Yog li ntawd, nws yuav tsis puas tus qauv thiab tsis muaj electron beam puas teeb meem ntawm scanning electron microscopy. Tsis tas li ntawd, scanning electron microscopy yuav tsum tau txheej txheej ntawm cov qauv uas tsis yog-conductive, thaum atomic force microscopy tsis.
3. Nws muaj ntau yam kev siv thiab tuaj yeem siv rau kev soj ntsuam saum npoo, ntsuas qhov loj me, qhov ntsuas qhov roughness, particle loj tsom xam, kev txheeb xyuas cov txheej txheem ntawm protrusions thiab pits, kev ntsuam xyuas ntawm cov txheej txheem tsim cov yeeb yaj kiab, ntsuas qhov loj me ntawm cov txheej txheem tiv thaiv, flatness ntsuam xyuas ntawm interlayer rwb thaiv tsev zaj duab xis, VCD txheej kev ntsuam xyuas ntawm cov txheej txheem kev kho, kev ntsuam xyuas cov txheej txheem ntawm frosts, lwm.
4. Lub software muaj peev xwm ua tau zoo, thiab nws cov duab 3D zaub loj, saib lub kaum sab xis, cov xim xim, thiab gloss tuaj yeem teeb tsa dawb. Thiab network, contour kab, thiab kab qhia tuaj yeem xaiv tau. Macro tswj kev ua cov duab, kev tsom xam ntawm cross-sectional shape and roughness, morphology analysis, and other functions.
