Ua hauj lwm hauv paus ntsiab lus ntawm atomic force microscopy thiab nws cov kev siv
Atomic force microscope yog ib qho kev sojntsuam sojntsuam microscope tsim los ntawm lub hauv paus ntsiab lus ntawm scanning tunneling microscope. Qhov tshwm sim ntawm atomic force microscopy tau ua lub luag haujlwm tseem ceeb hauv kev txhim kho nanotechnology. Kev sojntsuam sojntsuam microscopy, sawv cev los ntawm atomic force microscopy, yog ib lo lus dav dav rau ntau lub tshuab tsom iav uas siv lub ntsuas me me los luam theej duab saum npoo ntawm tus qauv, yog li muab kev soj ntsuam siab. AFM scans muab cov ntaub ntawv hais txog lub xeev saum npoo ntawm ntau hom qauv. Piv nrog rau cov pa microscopes, qhov zoo ntawm AFM yog tias nws tuaj yeem siv los soj ntsuam qhov saum npoo ntawm cov qauv ntawm kev nthuav dav hauv huab cua, thiab tuaj yeem siv rau yuav luag tag nrho cov qauv (nrog qee qhov yuav tsum tau ua kom tiav) yam tsis tas yuav tsum muaj. lwm cov qauv npaj kom tau txais daim duab peb-seem topographical ntawm tus qauv nto. Cov duab 3D scanned tuaj yeem siv rau kev suav roughness, thickness, kauj ruam dav, lub thawv ntawv lossis kev tshuaj xyuas granularity.
Atomic force microscopy tuaj yeem tshuaj xyuas ntau cov qauv, muab cov ntaub ntawv rau kev tshawb fawb saum npoo thiab kev tswj hwm kev tsim khoom lossis kev txhim kho cov txheej txheem uas siv cov khoom siv hluav taws xob roughness meters thiab electron microscopes tsis tuaj yeem muab.
Basic Principple
Atomic force microscopy siv qhov sib cuam tshuam quab yuam (atomic force) ntawm qhov chaw ntawm cov qauv ntsuas thiab cov lus qhia zoo los ntsuas qhov saum npoo av.
Qhov kev sojntsuam taub yog nyob rau ntawm me me bremsstrahlung cantilever, thiab thaum qhov kev sojntsuam kov cov qauv saum npoo, qhov kev sib cuam tshuam tau pom nyob rau hauv daim ntawv ntawm cantilever deflection. Qhov kev ncua deb ntawm tus qauv saum npoo thiab qhov kev sojntsuam yog tsawg dua 3-4 nm, thiab lub zog kuaj pom ntawm lawv, tsawg dua 10-8 N. Lub teeb los ntawm laser diode yog tsom rau sab nraum qab ntawm cantilever. Raws li lub cantilever khoov nyob rau hauv lub zog, lub teeb pom kev yog deflected, siv lub me ntsis-rhiab photodetector deflection lub kaum sab xis. Cov ntaub ntawv khaws tseg yog tom qab ntawd ua tiav los ntawm lub computer kom tau txais cov duab peb sab ntawm cov qauv saum npoo.
Ib qho kev sojntsuam cantilever tiav, muab tso rau ntawm tus qauv saum npoo raws li kev tswj hwm ntawm lub tshuab piezoelectric scanner, raug xa mus rau peb cov lus qhia hauv cov kauj ruam ntawm 0.1 nm lossis tsawg dua ntawm qhov raug. Feem ntau, qhov kev hloov pauv ntawm lub cantilever yog khaws cia nyob rau hauv qhov kev txiav txim ntawm Z-axis ntawm kev tawm tswv yim tswj raws li tus qauv saum npoo tau nthuav dav (XY-axis). Hauv kev teb rau kev luam theej duab yog cov lus tawm tswv yim Z-axis tus nqi yog nkag mus rau hauv lub computer ua, ua rau kev soj ntsuam ntawm cov qauv duab saum npoo (3D duab).
Nta ntawm Atomic Force Microscope
1. Muaj peev xwm daws teeb meem deb tshaj qhov scanning electron microscope (SEM), nrog rau cov cuab yeej kho qhov muag roughness. Cov ntaub ntawv peb-dimensional ntawm tus qauv saum npoo kom ua tau raws li cov kev xav tau ntawm kev tshawb fawb, kev tsim khoom, kev tshuaj xyuas zoo dua thiab ntau dua microscopic.
2. Tsis muaj kev puas tsuaj, kev sojntsuam thiab cov qauv ntawm qhov sib cuam tshuam ntawm lub zog ntawm 10-8N lossis tsawg dua, deb tsawg dua li yav dhau los stylus roughness ntsuas qhov siab, yog li yuav tsis muaj kev puas tsuaj rau tus qauv, tsis muaj cov khoom siv hluav taws xob tshuab hluav taws xob electron beam. kev puas tsuaj. Tsis tas li ntawd, lub tshuab ntsuas hluav taws xob ntsuas hluav taws xob xav tau cov qauv uas tsis yog coj los ua coated, thaum lub atomic force microscope tsis tas yuav tsum tau.
3. Kev siv ntau yam, tuaj yeem siv rau kev soj ntsuam saum npoo, kev txiav txim siab loj, qhov kev txiav txim siab ntawm qhov roughness, granularity tsom, protrusions thiab pits ntawm kev txheeb cais, kev soj ntsuam ntawm zaj duab xis-forming tej yam kev mob, qhov loj ntawm cov txheej txheem tiv thaiv kev txiav txim ntawm cov kauj ruam, lub interlayer insulating zaj duab xis flatness kev ntsuam xyuas, VCD txheej kev ntsuam xyuas, kev ntsuam xyuas ntawm kev sib txhuam kev kho mob ntawm directional zaj duab xis txheej txheem, kev soj ntsuam tsis xws luag.
4. Muaj zog software ua haujlwm, nws cov duab peb-seem tso saib nws qhov loj me, saib lub kaum sab xis, tso saib xim, gloss tuaj yeem teeb tsa dawb. Thiab tuaj yeem xaiv lub network, contour, kab zaub. Macro tswj ntawm cov duab ua, cov duab ntawm seem thiab roughness tsom xam, morphological tsom xam thiab lwm yam dej num.
