Lub hauv paus ntsiab lus ua haujlwm thiab kev siv atomic force microscope
Atomic force microscope thiab nws daim ntawv thov
Atomic force microscope yog ib qho kev sojntsuam sojntsuam microscope tsim los ntawm lub hauv paus ntsiab lus ntawm scanning tunneling microscope. Qhov tshwm sim ntawm atomic force microscope tau ua lub luag haujlwm tseem ceeb hauv kev txhawb nqa txoj kev loj hlob ntawm nanotechnology. Lub tshuab ntsuas ntsuas ntsuas ntsuas uas sawv cev los ntawm atomic force microscope yog ib lub ntsiab lus dav dav rau ntau lub tshuab ntsuas hluav taws xob uas siv lub ntsuas me me los ntsuas rau saum npoo ntawm cov qauv los muab kev soj ntsuam siab. AFM scanning tuaj yeem muab cov ntaub ntawv ntawm lub xeev ntawm ntau hom qauv. Piv nrog rau cov pa microscopes, qhov zoo ntawm atomic force microscopy yog tias nws tuaj yeem soj ntsuam cov qauv saum npoo ntawm kev nthuav dav hauv huab cua, thiab tuaj yeem siv rau yuav luag tag nrho cov qauv (nrog qee qhov yuav tsum tau ua kom tiav), tsis muaj lwm yam kev npaj ua, qauv nto tuaj yeem tau txais 3D duab ntawm . Nws tseem tuaj yeem ua qhov kev suav roughness, thickness, kauj ruam dav, thaiv daim duab los yog particle loj tsom xam ntawm daim duab 3D topography.
AFM tuaj yeem ntes ntau cov qauv thiab muab cov ntaub ntawv rau kev tshawb fawb saum npoo av thiab kev tswj hwm kev tsim khoom lossis kev tsim kho, uas tsis tuaj yeem muab los ntawm cov qauv ntsuas qhov roughness meters thiab electron microscopes.
1. Cov hauv paus ntsiab lus
Lub atomic force microscope siv cov kev sib cuam tshuam quab yuam (atomic force) ntawm cov qauv kuaj pom saum npoo thiab qhov ntsuas me me los ntsuas qhov saum npoo ntawm qhov chaw.
Qhov kev sojntsuam taub yog nyob rau ntawm lub me me hloov tau yooj yim cantilever, thiab thaum qhov kev sojntsuam kov cov qauv saum npoo, qhov kev sib cuam tshuam tau pom nyob rau hauv daim ntawv ntawm cantilever deflection. Qhov kev ncua deb ntawm tus qauv saum npoo thiab qhov kev sojntsuam yog tsawg dua 3-4nm, thiab lub zog kuaj pom ntawm lawv tsawg dua 10-8N. Lub teeb los ntawm lub laser diode yog tsom rau sab nraum qab ntawm cantilever. Thaum lub cantilever khoov hauv qab quab yuam, lub teeb pom kev zoo yog deflected siv lub kaum sab xis photodetector deflection lub kaum sab xis. Tom qab ntawd cov ntaub ntawv sau tau ua tiav los ntawm lub computer kom tau txais cov duab peb sab ntawm cov qauv saum npoo.
Qhov ua tiav cantilever sojntsuam yog muab tso rau saum npoo ntawm cov qauv tswj los ntawm piezoelectric scanner thiab luam tawm hauv peb cov lus qhia nrog rau qib siab ntawm 0.1nm lossis tsawg dua. Feem ntau, lub cantilever qhov kev tawm tswv yim tawm tswv yim-tswj Z-axis tseem nyob tas li thaum kev soj ntsuam ntxaws (XY-axis) tau ua rau ntawm tus qauv saum npoo. Tus nqi Z-axis uas yog cov lus tawm tswv yim ntawm cov lus teb scanning yog nkag mus rau hauv lub computer rau kev ua, thiab cov duab saib (3D duab) ntawm cov qauv saum npoo tau txais.
Thib ob, cov yam ntxwv ntawm lub tshuab hluav taws xob atomic force microscope
1. Cov peev xwm daws teeb meem siab tshaj qhov ntsuas hluav taws xob ntsuas hluav taws xob (SEM), thiab ntsuas qhov ntsuas qhov ntsuas qhov ntsuas. Cov ntaub ntawv peb-dimensional ntawm tus qauv saum npoo ua tau raws li qhov xav tau ntawm microscopic ntau ntxiv ntawm kev tshawb fawb, kev tsim khoom, thiab kev tshuaj xyuas zoo.
2. Tsis muaj kev puas tsuaj, kev sib cuam tshuam ntawm qhov kev sojntsuam thiab cov qauv saum npoo yog tsawg dua 10-8N, uas yog qis dua qhov siab ntawm lub ntsuas stylus roughness yav dhau los, yog li nws yuav tsis ua rau cov qauv puas, thiab muaj yog tsis muaj electron beam puas teeb meem ntawm scanning electron microscope. Tsis tas li ntawd, scanning electron microscopy yuav tsum tau txheej ntawm cov qauv uas tsis yog-conductive, thaum atomic force microscopy tsis.
3. Nws tuaj yeem siv rau hauv ntau yam kev siv, xws li kev soj ntsuam saum npoo, ntsuas qhov loj me, qhov ntsuas qhov roughness, particle loj tsom xam, kev txheeb xyuas ntawm protrusions thiab pits, kev ntsuam xyuas ntawm zaj duab xis tsim cov xwm txheej, ntsuas kev tiv thaiv txheej txheej loj, kev ntsuam xyuas ntawm flatness ntawm interlayer insulating zaj duab xis, VCD txheej kev ntsuam xyuas, kev ntsuam xyuas ntawm kev sib txhuam kev kho cov txheej txheem ntawm oriented zaj duab xis, tsis xws luag tsom xam, thiab lwm yam.
4. Lub software muaj zog ua haujlwm, thiab nws cov duab peb sab zaub loj, saib lub kaum sab xis, tso saib xim, thiab gloss tuaj yeem teeb tsa dawb. Thiab tuaj yeem xaiv lub network, kab contour, kab zaub. Macro tswj kev ua cov duab, cov duab sib dhos thiab kev soj ntsuam roughness, kev txheeb xyuas topography thiab lwm yam haujlwm.
