Dab tsi yog yam uas cuam tshuam rau kev daws teeb meem ntawm kev xa hluav taws xob hluav taws xob?
A. Teeb meem electron beam qhov chaw txoj kab uas hla: qhov txwv ntawm kev daws teeb meem ntawm SEM. Feem ntau, qhov tsawg kawg nkaus txoj kab uas hla ntawm kub cathode electron phom tuaj yeem txo mus rau 6nm, thiab cov phom hluav taws xob hluav taws xob tuaj yeem ua rau qhov chaw txoj kab uas hla tsawg dua 3nm.
B. Kev nthuav dav ntawm qhov xwm txheej electron beam nyob rau hauv cov qauv: qhov degree ntawm diffusion nyob ntawm qhov teeb meem beam electron zog thiab atomic tooj ntawm cov qauv. Qhov siab dua lub zog ntawm qhov teeb meem beam thiab qis dua cov atomic naj npawb ntawm cov qauv, qhov loj dua qhov ntim ntawm cov kab hluav taws xob electron, qhov loj dua qhov chaw ntawm lub teeb liab generated nrog lub diffusion ntawm electron beam, yog li txo qhov kev daws teeb meem.
C. imaging method thiab modulation teeb liab siv: thaum lub thib ob electron modulation teeb liab, vim nws tsis tshua muaj zog (tsawg dua 50 eV), qhov nruab nrab dawb ntau yog luv luv (10 ~ 100 nm los yog li ntawd), tsuas yog nyob rau hauv lub nto txheej ntawm Qhov tob ntawm 50 ~ 100 nm ntawm cov khoom siv hluav taws xob thib ob tuaj yeem khiav tawm ntawm cov qauv saum npoo, qhov tshwm sim ntawm tus naj npawb ntawm kev tawg yog qhov txwv tsis pub tshaj, qhov pib tsis nthuav dav tom qab, yog li qhov kev daws teeb meem ntawm cov duab hluav taws xob thib ob yog kwv yees li ntawm qhov sib npaug. qhov chaw diam. Thaum lub backscattered electrons yog siv los ua lub teeb liab modulation, lub backscattered electrons tuaj yeem khiav tawm ntawm thaj tsam sib sib zog nqus ntawm cov qauv (kwv yees li 30% ntawm qhov tob tob) vim lawv lub zog siab thiab muaj peev xwm nkag mus. Nyob rau hauv qhov tob no, qhov xwm txheej electrons tau nthuav dav dav, yog li qhov kev daws teeb meem ntawm cov duab hluav taws xob rov qab yog qis dua li cov duab electron thib ob, feem ntau hauv 500 ~ 2000nm lossis li ntawd. Yog hais tias qhov nqus ntawm electrons, X-rays, cathodoluminescence, beam sensing conductance los yog muaj peev xwm raws li ib tug modulation teeb liab ntawm lwm yam kev ua hauj lwm, vim lub teeb liab los ntawm tag nrho cov electron beam scattering cheeb tsam, lub resulting scanning duab ntawm qhov kev daws teeb meem yog tsawg, feem ntau nyob rau hauv l, 000 nm los yog l,000 nm los yog ntau tshaj qhov sib txawv.
