Ob peb hom Flatness Measurement Methods ntawm Qib Meter
Flatness yog ib qho ntawm geometric tolerances, uas yog hais txog qhov sib txawv ntawm macro-concave-convex qhov siab ntawm qhov khoom ntawm lub dav hlau zoo tagnrho. Nyob rau hauv txoj kev tshawb nrhiav ib txwm muaj, kev ntsuas ntawm flatness feem ntau muaj xws li: plug gauge/feeler gauge measurement method, liquid level method, laser plane interferometer measurement method (flat crystal interferometry method), level meter/digital level measurement method, and meter measurement Law.
Txoj kev ntsuas qhov ntsuas qhov ntsuas qhov ntsuas tsuas yog xav tau ib txheej ntawm cov ntsuas ntsuas ntsuas ntsuas ntsuas ntsuas qhov ntsuas ntawm qhov tiaj tus txhua lub sijhawm thiab nyob qhov twg. Tam sim no, ntau lub Hoobkas tseem siv txoj hauv kev no los kuaj xyuas. Vim nws tsis tshua muaj precision, lub thinnest pa ntsuas ntsuas yog 10um, qhov kev tshawb pom efficiency yog tsawg, qhov tshwm sim tsis zoo txaus, thiab tsuas yog lub ntug ntawm ib feem tuaj yeem ntes tau.
Cov txheej txheem ua kua, raws li txoj cai ntawm kev ua haujlwm ntawm cov khoom sib txuas, yog tsim los ntsuas qhov flatness ntawm cov dav hlau tsis tu ncua lossis tsis tu ncua, tab sis nws yuav siv sij hawm ntev los ntsuas thiab rhiab rau qhov kub thiab txias, yog li nws tsuas yog haum rau cov dav hlau nrog qis. ntsuas qhov tseeb.
Laser dav hlau interferometer ntsuas txoj kev, feem ntau raug siv yog ca siv lead ua interferometry. Tab sis nws yog tsuas yog siv rau kev ntsuas ntawm cov dav hlau du, xws li ntsuas qhov chaw ntawm lub micrometer, qhov chaw ua haujlwm ntawm qhov ntsuas, thiab lub lens optical.
Txoj kev ntsuas qib yog siv dav hauv kev ntsuas qhov ncaj thiab flatness ntawm qhov chaw ua haujlwm. Kev ntsuas siab raug, ruaj khov zoo, me me, yooj yim nqa. Txawm li cas los xij, thaum siv cov qauv no los ntsuas, nws yog ib qho tsim nyog yuav tsum rov ua haujlwm ntawm qhov ntsuas thiab sau cov ntaub ntawv ntawm txhua qhov ntsuas, uas yog siv sijhawm ntev, ua haujlwm hnyav, lub sijhawm hloov kho ntev, thiab cov txheej txheem ua cov ntaub ntawv yog cumbersome.
Daim ntawv thov kev ntsuas kev ntsuas ntsuas yog lub tiaj tus micrometer thiab peb-coordinate ntsuas, cov uas peb-coordinate ntsuas yog siv dav tshaj plaws. Thaum lub sij hawm ntsuas, qhov taw qhia txav ntawm cov qauv yuav tsum tau kuaj, thiab cov ntaub ntawv ntawm txhua qhov ntsuas qhov ntsuas txheeb ze rau kev ntsuas ntsuas yog ntsuas raws li cov ntsiab lus xaiv layout, thiab tom qab ntawd qhov kev ua yuam kev flatness yog ntsuas los ntawm kev ua cov ntaub ntawv. Tab sis nws cov kev ua tau zoo yog tsawg, feem ntau cov qauv siv sijhawm ob peb feeb, deb ntawm qhov kev cia siab ntawm 15ppm.
