Cov ntsiab lus thiab kev siv ntawm Scanning Electron Microscopy
Features ntawm SEM
Piv nrog rau optical microscope thiab kis electron microscope, scanning electron microscope muaj cov yam ntxwv hauv qab no:
(1) Cov qauv saum npoo ntawm cov qauv tuaj yeem pom ncaj qha, thiab qhov loj ntawm cov qauv tuaj yeem loj li 120mm × 80mm × 50mm.
(2) Cov txheej txheem kev npaj ua qauv yog yooj yim thiab tsis tas yuav txiav rau hauv nyias nyias.
(3) Cov qauv tuaj yeem muab txhais thiab tig rau hauv qhov chaw peb sab hauv cov qauv chav, yog li cov qauv tuaj yeem pom los ntawm ntau lub kaum ntse ntse.
(4) Qhov tob ntawm daim teb yog loj, thiab cov duab yog tag nrho ntawm peb-dimensionality. Qhov tob ntawm thaj chaw ntawm lub tshuab ntsuas hluav taws xob ntsuas hluav taws xob yog ntau pua lub sij hawm loj dua li ntawm lub tshuab ntsuas qhov muag thiab kaum ob lub sij hawm loj dua li ntawm kev xa hluav taws xob tshuab hluav taws xob.
(5) Qhov loj ntawm daim duab yog qhov dav thiab qhov kev daws teeb meem yog qhov siab. Nws tuaj yeem nthuav dav kaum zaug mus rau ntau pua txhiab zaus, thiab nws pib suav nrog ntau qhov kev nthuav dav los ntawm cov iav tsom iav, kho qhov muag tsom mus rau kev xa hluav taws xob microscope. Qhov kev daws teeb meem yog nruab nrab ntawm optical microscope thiab kis tau tus mob electron microscope, mus txog 3nm.
(6) Qhov kev puas tsuaj thiab kev kis kab mob ntawm cov qauv los ntawm cov kab hluav taws xob yog qhov me me.
(7) Thaum soj ntsuam cov morphology, lwm cov cim qhia los ntawm cov qauv kuj tuaj yeem siv rau kev tsom xam micro-cov ntsiab lus.
Tus qauv thiab lub hauv paus ntsiab lus ua haujlwm ntawm scanning electron microscope
1. lens chim
Lub lens chim muaj xws li phom electron, condenser lens, lub hom phiaj lens thiab scanning system. Nws txoj haujlwm yog tsim kom muaj ib lub teeb hluav taws xob nyias nyias (txog li ob peb nm hauv txoj kab uas hla), thiab ua kom lub teeb hluav taws xob luam theej duab ntawm tus qauv, thiab ib txhij txhawb ntau yam teeb liab.
2. Hluav taws xob teeb liab sau thiab kev ua haujlwm
Nyob rau hauv cov qauv chamber, lub scanning electron beam cuam tshuam nrog cov qauv los tsim ntau yam teeb liab, nrog rau lwm yam electrons, backscattered electrons, X-rays, absorbed electrons, Auger electrons, thiab lwm yam. Ntawm cov saum toj no cov teeb liab, qhov tseem ceeb tshaj plaws yog cov thib ob electrons. , uas yog cov txheej txheem electrons hauv cov qauv atoms zoo siab los ntawm qhov xwm txheej electrons, uas yog tsim nyob rau hauv thaj tsam ntawm ob peb nm mus rau kaum ntawm nm hauv qab ntawm tus qauv saum npoo, thiab tiam neeg feem ntau yog nyob ntawm Morphology thiab muaj pes tsawg leeg ntawm cov qauv. Lub npe hu ua scanning electron duab feem ntau yog hais txog cov duab electron thib ob, uas yog qhov tseem ceeb tshaj plaws hauv hluav taws xob teeb liab rau kev kawm txog qhov chaw morphology ntawm tus qauv. Lub tshuab kuaj xyuas cov khoom siv hluav taws xob thib ob (qhov kev sojntsuam hauv daim duab 15(2) yog lub tshuab hluav taws xob, thaum lub tshuab hluav taws xob ntaus lub scintillator, 1 yuav tsim lub teeb nyob rau hauv nws, lub teeb no xa mus rau lub photomultiplier raj los ntawm lub teeb qhia, thiab lub teeb liab teeb liab. Ntawd yog, nws tau hloov dua siab tshiab rau hauv lub teeb liab tam sim no, thiab tom qab ntawd los ntawm pre-amplification thiab video amplification, lub teeb liab tam sim no hloov mus rau hauv lub teeb liab voltage, thiab thaum kawg xa mus rau daim phiaj ntawm daim duab raj.
